The viability of producing silicon nanoparticles using the HWCVD process is investigated. A system is assembled and particles are produced from silane at pressures between 0.2 – 48 mbar, with hydrogen dilutions of 0-80%, at a total flow rate of 50 sccm and with a tungsten filament maintained at 1650ºC. The as-prepared powder varies in colour from yellowish to dark brown and is deposited on all surfaces inside the reaction chamber. The material is a highly porous agglomeration of nanoparticles of primary size in the order of 40 nm, with a narrow size distribution. The nanoparticles produced are mostly amorphous, hydrogenated and have a partially oxidized surface.
Reference:
Scriba, MR, Arendse, CJ, Harting, M and Britton, DT. 2008. Hot-wire synthesis of Si nanoparticles. Thin Solid Films, vol. 516(5), pp 844-846
Scriba, M. R., Arendse, C., Harting, M., & Britton, D. (2008). Hot-wire synthesis of Si nanoparticles. http://hdl.handle.net/10204/5730
Scriba, Manfred R, CJ Arendse, M Harting, and DT Britton "Hot-wire synthesis of Si nanoparticles." (2008) http://hdl.handle.net/10204/5730
Scriba MR, Arendse C, Harting M, Britton D. Hot-wire synthesis of Si nanoparticles. 2008; http://hdl.handle.net/10204/5730.
Copyright: 2007 Elsevier B.V. This is the accepted version of the work. The definitive version is published in Thin Solid Films, vol. 516(5), pp 844-846
